Tohoku Gakuin University Hi-tech Research Center

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Equipment

Thin film preparation

  • UHV Sputtering System
  • Electron Beam Deposition System
  • Molecular Beam Epitaxy System (MBE)

Nano-fabrication

  • Electron Beam Lithograph System
  • Ar Ion Etching System

Evaluation

  • Magnetic Force Microscope equipped with electromagnet
  • Atomic Force Microscope
  • X-ray Diffraction System with 2 Dimensional Detector
  • Superconducting Quantum Interference Devise magnetometer (SQUID)
  • Physical Property Measurement System (PPMS)
  • Nano-Indentor System
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