Equipment

Nano-Indentor System

The Nano-Indentation System evaluates the mechanical properties such as an elastic property of thin film sample and fine region. Nano-indentation operation under ultra-low-load is practicable with high preciseness and enables to obtain several material factors such as hardness and Young modulus continuously as the function of the direction of depth by one-time indentation-test. The System possesses the following features on the estimation of the hardness and the Young modulus of thin film and fine area; 1) Wider range of load of 19 μN (ultra low load)〜980 mN is measurable with high preciseness by electromagnetic driving method. 2) High precision position-decision-stage and high-resolution ability are equipped. 3) The Electrostatic Capacitance Non-Contact Displacement Meter realizes the displacement resolution ability of 0. 3 nm. 4) Equipped CCD camera for observation of samples enables the position decision throughout observing the measurement-point on the monitor of personal computer. 5) Ultra-high-precision-stage driven by stepping motor enables to measure fully automatically the plural numbers of measurement-points.


These excellent characteristics have high abilities for the measurements of the hardness and the Young modulus in ultra thin films and fine region for metals, ceramics and polymeric materials.

Type

ENT-1100a-T (Elionics Inc. )